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Auto De-frame Equipment

Auto De-frame Equipment

Automatic Cassette Transfer

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自動化膠膜下鐵框並將膠膜上之廢Die拍照留存，可有效減少人力需 求，報廢膠膜自動包裝貼標以便後續查詢。

• 8“ & 12” Wafer共用
• 自動切換作業尺寸
• OCR Reader 識別Wafer身份
• NG DIE拍照留存功能
• 可與鐵框清洗機進行DOCKING
• 具備晶圓下框、膠膜包裝、貼標功能
• UPH：70±10pcs/hr
• For E84 SPEC
• For SECS/GEM SPEC

Product Details
  • Product Details

自動化膠膜下鐵框並將膠膜上之廢Die拍照留存，可有效減少人力需 求，報廢膠膜自動包裝貼標以便後續查詢。

• 8“ & 12” Wafer共用
• 自動切換作業尺寸
• OCR Reader 識別Wafer身份
• NG DIE拍照留存功能
• 可與鐵框清洗機進行DOCKING
• 具備晶圓下框、膠膜包裝、貼標功能
• UPH：70±10pcs/hr
• For E84 SPEC
• For SECS/GEM SPEC

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